EUV Light Lab · tin, lasers and mirrors

EUV 光源實驗室

50,000 tin droplets a second, each hit twice by a laser.

Source —
EUV AT FOCUS —
CONVERSION —
COLLECTOR —
AT THE WAFER —
WAFERS / HOUR —
PHOTONS / nm² —
晶片上最細的圖案,是錫滴爆出來的光畫出來的
The finest patterns on every chip are drawn with light from exploding drops of tin.
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