E-beam Inspection Lab · hunting nanometre defects

電子束檢測實驗室

The smaller the pixel, the more you see, and the slower you scan.

Tool —

PIXEL —

AREA / HOUR —

FULL WAFER —

IN 2 HOURS —

VC OPEN / SHORT —

CD PRECISION —

像素越小，看得越清楚，也掃得越慢

The smaller the pixel, the more you see, and the slower you scan.

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